Note: This course is not available in 2026.

Course overview

Description

This Master of Semiconductor Science and Technology has been designed in consultation with industry to equip graduates with the knowledge and skills required for the contemporary and future semiconductor industry. The course covers six core areas: (i) advanced Complementary Metal-Oxide-Semiconductor (CMOS) technology, (ii) power semiconductors, (iii) photovoltaic semiconductors, (iv) microelectromechanical systems, (v) semiconductor nanoelectronics, and (vi) semiconductor optoelectronics.

Supported by facilities at the Australian National Fabrication Facility, the course emphasises hands-on learning and practical experience across the semiconductor lifecycle, including design, fabrication, packaging and testing. It also develops research, communication and teamwork skills relevant to professional practice.

Note: The Master of Semiconductor Science and Technology is an advanced, specialised master's program and is not accredited by Engineers Australia. Completion of this course does not qualify graduates to practise as accredited professional engineers in Australia. To obtain accreditation, a qualification recognised under the Washington Accord or a successful migrant skills assessment by Engineers Australia is required. Applicants seeking an accredited pathway should consider the Bachelor of Engineering (Honours) or the Master of Professional Engineering.

Course title
Master of Semiconductor Science and Technology (coursework)
Award abbreviation
MSST
Course code
60630
Course type
Master's degree by coursework only
Status
Not available in 2026
Administered by
Engineering

Course details

Intake periods
Mid-year only
Attendance type
Full-time only
Credit points required
96
A standard full-time load is 24 points per semester.
Standard course duration
1.5 years full-time (or equivalent part-time) comprising 72 points of taught units and 24 points of admission credit, as recognised and granted by the School
Maximum course duration
2 years full-time (or equivalent part-time) comprising up to 96 points of taught study (see Rule 5 for further information)
Time limit
5 years
Delivery mode
Internal
Locations offered
UWA (Perth)
Domestic fee type
Postgraduate fee-paying/FEE-HELP
Available to international students
Not available to international students on student visas. Available to international students on other visas if visa conditions allow (see https://www.immi.gov.au). For information on international student fees see 'Student Procedures: Fees'. (Enquiries: https://www.uwa.edu.au/askuwa)
Course Coordinator(s)
Professor Wen Lei
Fees
Visit the fees calculator.

Prospective students should see the Future Students website for details on admission requirements, intake periods, fees, availability to international students, careers information etc.

No study plans found for this course. Check your chosen major, see study plans or contact your student advising office for more information.

Course structure

Key to availability of units:
S1
Semester 1
S2
Semester 2
SS
summer teaching period
N/A
not available in 2026 – may be available in 2027 or 2028
*
to be advised

Students who have not completed the following units from this University, or equivalent, as recognised by the School, must complete 24 points of conversion units, comprising:
ELEC3014 (6 points) and ELEC3021 (6 points);
MATH2501 (6 points) or MATH3023 (6 points);
STAT1400 (6 points) or STAT2063 (6 points).

AvailabilityUnit codeUnitnameUnit requirementsContact hours
S1ELEC3014Electronic Materials and Devices
Prerequisites
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree
and Successful completion of
MATH1012 Mathematical Theory and Methods
or MATX1012 Mathematical Theory and Methods
and PHYS2003 Physics for Electrical Engineers
and ENSC2003 Engineering Electrical Fundamentals
Incompatibility
ENSC3014 Electronic Materials and Devices
lectures: 3 hours per week; practical classes: 1 hour per week; laboratories: 9 hours per semester
S1ELEC3021Circuits and Electronics
Prerequisites
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree
and Successful completion of
( MATH1011 Multivariable Calculus
or MATX1011 Multivariable Calculus
and ENSC2003 Engineering Electrical Fundamentals )
Incompatibility
ENSC3021 Circuits and Electronics
Lecture-Tutorials: 6 hours per week; Laboratories: 6 hours per semester
S1MATH2501Advanced Mathematical Methods
Prerequisites
MATH1011 Multivariable Calculus
or MATX1011 Multivariable Calculus
Co-requisites
MATH1012 Mathematical Theory and Methods
or MATX1012 Mathematical Theory and Methods
Incompatibility
MATH3023 Advanced Mathematics Applications
and GENG4407 Advanced Engineering Mathematics
lectures: 2 hours per week; practical classes: 1 hour per week
S2MATH3023Advanced Mathematics Applications
Prerequisites
MATH1011 Multivariable Calculus
or MATX1011 Multivariable Calculus
Co-requisites
MATH1012 Mathematical Theory and Methods
or MATX1012 Mathematical Theory and Methods or equivalent
Incompatibility
MATH2501 Advanced Mathematical Methods
and GENG4407 Advanced Engineering Mathematics
Lectures: 3-hours per week; Practical Classes: 2-hours per week
S1, S2STAT1400Statistics for Science
Prerequisites
Mathematics Applications ATAR
or MATH1720 Mathematics Fundamentals
or MATX1720 Mathematics Fundamentals or equivalent
or
Enrolment in
62530 Master of Data Science
Incompatibility
STAT1520 Economic and Business Statistics
Lectures: 3-hours per week; Laboratories: 2-hours per week
S1STAT2063Probabilistic Methods and their Applications
Prerequisites
MATH1011 Multivariable Calculus
or MATX1011 Multivariable Calculus
and
MATH1012 Mathematical Theory and Methods
or MATX1012 Mathematical Theory and Methods
and Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree
Incompatibility
STAT2062 Fundamentals of Probability with Applications
Lectures: 2-hours per week; Laboratory/Tutorials: 2-hours per week

Take all units (48 points):

AvailabilityUnit codeUnitnameUnit requirementsContact hours
N/AELEC4001Micro-electromechanical Systems (MEMS)
Prerequisites
Enrolment in
60630 Master of Semiconductor Science and Technology
Lecture-Tutorials: 6 hours per week; Laboratories: 12 hours per semester
S2ELEC4405Photovoltaics and its Application to Power Systems
Prerequisites
Enrolment in 62560 Master of Renewable and Future Energy
or
Enrolment in
BH011 Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
( 96 points
and ENSC2003 Engineering Electrical Fundamentals
)
lectures: 36 hours; practical classes: 12 hours; labs: 9 hours
N/AELEC5001Optoelectronic Devices
Prerequisites
Enrolment in
60630 Master of Semiconductor Science and Technology
or 62550 Master of Professional Engineering
or BH011 Bachelor of Engineering (Honours)
or associated combined degree
and Successful completion of
ELEC3014 Electronic Materials and Devices or equivalent
Lecture-Tutorials: 6 hours per week; Laboratories: 12 hours per semester
N/AELEC5002Advanced CMOS Technology
Prerequisites
Enrolment in
60630 Master of Semiconductor Science and Technology
and Successful completion of
ELEC3014 Electronic Materials and Devices or equivalent
Lecture-Tutorials: 6 hours per week; Laboratories: 12 hours per semester
N/AELEC5003Power Semiconductor Devices
Prerequisites
Enrolment in
Master of Semiconductor Science and Technology
or 62550 Master of Professional Engineering
or Bachelor of Engineering (Honours) or an associated Combined Degree
and Successful completion of
ELEC3014 Electronic Materials and Devices or equivalent
Lecture-Tutorials: 6 hours per week; Laboratories: 12 hours per semester
N/AELEC5004Semiconductor Research Project Part 1
Prerequisites
Enrolment in
60630 Master of Semiconductor Science and Technology
12 hours' lecture-tutorials for the first two weeks, and then 60 hours' lab research for the rest weeks.
N/AELEC5005Semiconductor Research Project Part 2
Prerequisites
Enrolment in
60630 Master of Semiconductor Science and Technology
Lab research: 6 hours per week.
S1ELEC5508Semiconductor Nanoelectronics
Prerequisites
Enrolment in 62550 Master of Professional Engineering (Electrical and Electronic Engineering specialisation)
or
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
( 120 points
and ELEC3014 Electronic Materials and Devices
)

Take unit(s) to the value of 24 points:

Note: Enrolment in option units will be determined on recommendation from the School, based on each student's background, prerequisites, and academic goals.

AvailabilityUnit codeUnitnameUnit requirementsContact hours
S1, S2BUSN5100Applied Professional Business Communications
Incompatibility
WACE/TEE English or equivalent
or BUSN4003 Applied Business Communication
or MGMT5610 Applied Professional Business Communications
lectures/seminars/workshops: up to 3 hours per week
S2ELEC4406Digital System Design
Prerequisites
Enrolment in
62550 Master of Professional Engineering (Electrical and Electronic Engineering specialisation
or Software Engineering specialisation)
Lectures: 3 hours per week, Laboratories: 16 hours for semester
S1ELEC4407Engineering Electromagnetics
Prerequisites
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
PHYS2003 Physics for Electrical Engineers
and ELEC3021 Circuits and Electronics
and MATH3023 Advanced Mathematics Applications
Incompatibility
ELEC4401 Circuits and Electronic Systems
Lectures: 3 hours per week; Practical classes 2 hours per week, Laboratories: 8 hours per semester
N/AELEC5502Analogue Electronics
Prerequisites
62550 Master of Professional Engineering (Electrical and Electronic Engineering specialisation)
lectures, practical classes and laboratories
S1ELEC5503Digital Microelectronics System Design
Prerequisites
Enrolment in 62550 Master of Professional Engineering (Electrical and Electronic Engineering specialisation)
or
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
( 120 points
and ELEC3020 Embedded Systems
)
lectures, practical classes and laboratories
S1ELEC5504Power Electronics
Prerequisites
Enrolment in
62550 Master of Professional Engineering (Electrical and Electronic Engineering specialisation)
or Enrolment in 62560 Master of Renewable and Future Energy
or
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
( 120 points
and ELEC3021 Circuits and Electronics
)
lectures: 36 hours; practical classes: 12 hours; labs: 9 hours
S1, S2GENG5505Project Management and Engineering Practice
Prerequisites
Enrolment in
62550 Master of Professional Engineering
or Enrolment in
62530 Master of Data Science
or Enrolment in
62540 Master of Ocean Leadership
or Enrolment in
62560 Master of Renewable and Future Energy
or Enrolment in 62570 Master of Offshore and Coastal Engineering
or
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
120 points
lectures: 24 hours; practical classes: 12 hours
S2GENG5506Renewable Energy
Prerequisites
Enrolment in 62550 Master of Professional Engineering
or
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
( MATH1012 Mathematical Theory and Methods
or MATX1012 Mathematical Theory and Methods
)
or Enrolment in
62520 Master of Low Emission Energy Technologies
or Enrolment in
62540 Master of Ocean Leadership
lectures and practical classes
S2MECH4424Measurement and Noise
Prerequisites
Enrolment in
62550 Master of Professional Engineering (Mechanical Engineering specialisation
or Biomedical Engineering specialisation)
or Enrolment in 62560 Master of Renewable and Future Energy
or
Enrolment in
BP007 Bachelor of Automation and Robotics
and Successful completion of
( ( CITS1001 Software Engineering with Java
or CITX1001 Software Engineering with Java

and ENSC3001 Mechanisms and Machines )
Incompatibility
MECH3424 Measurement and Instrumentation
lectures/information sessions: 3 hours per week; practical classes: 1 hour per week; labs: 2 hours per week
S1MECH4428Degradation of Materials
Prerequisites
Enrolment in 62550 Master of Professional Engineering (Mechanical Engineering specialisation)
or
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
( 96 points
and MECH2002 Engineering Materials 2
)
lectures: 3 hours per week; practical classes: 1 hour per week
S2MECH5504Design and Failure Analysis of Materials
Prerequisites
Enrolment in 62550 Master of Professional Engineering (Mechanical Engineering specialisation)
or
Enrolment in
Bachelor of Engineering (Honours) or an associated Combined Degree and a WAM of at least 50
and Successful completion of
( 120 points
and MECH2002 Engineering Materials 2
and GENG2004 Solid Mechanics
)
lectures, practical classes and laboratories
S1, S2MGMT5504Data Analysis and Decision Making
Incompatibility
MGMT5513 Data Driven Decision Making
lectures/seminars/workshops: up to 3 hours per week
S1, S2MGMT5507Management and Organisations
Incompatibility
MGMT1136 Management and Organisations
lectures/seminars/workshops: up to 3 hours per week
S2MGMT5508Organisational Behaviour and LeadershipNone1-hour lecture and 2-hour workshop per week for 12 weeks
S1PHYS4020Frontiers in Experimental Physics
Prerequisites
Enrolment in in the
HON-PHYSC Physics [Honours]
or the CM015 Bachelor of Science [Frontier Physics] and Master of Physics
or the 53560 Master of Physics
and
completion of the core units in the Physics major or equivalent
or
Course Enrolment in the
65550 Master of Quantum Technology and Computing and ( MATH1012 Mathematical Theory and Methods
or MATX1012 Mathematical Theory and Methods
and PHYS2001 Quantum Physics and Electromagnetism
and PHYS3001 Quantum Mechanics and Atomic Physics )
Lectures: 2 x 45 minutes per week; Practical Classes: 2 x 45 minutes per week.
S1PHYS4021Quantum Information and Computing
Prerequisites
Enrolment in
CM015 Bachelor of Science Frontier Physics and Master of Physics
or 53560 Master of Physics
or 65550 Master of Quantum Technology and Computing
or HON-MTHST Mathematics and Statistics
or HON-MATHS Mathematics
or HON-MATHH Mathematics
or HON-STATS Statistics
or HON-STATH Statistics
( HON-CMSSE Computer Science and Software Engineering
or MJD-ICYDM International Cybersecurity
or 62530 Master of Data Science and
MATH1012 Mathematical Theory and Methods or equivalent
or MATX1012 Mathematical Theory and Methods
Incompatibility
PHYS3005 Quantum Computation
Lectures/Workshop: 3 x 45 minutes per week
N/APHYS4415Special Topics in Physics I
Prerequisites
Enrolment in in the
HON-MTHST Mathematics and Statistics
or HON-PHYSC Physics
or CM015 Bachelor of Science Frontier Physics and Master of Physics
or 53560 Master of Physics
and
completion of the core units in the Physics major or equivalent
Lectures: 3 x 45 minutes per week; Practical Classes: 1 x 45 minutes per week.
S2PHYS5020Quantum Measurement and Technology
Prerequisites
Enrolment in in the
HON-PHYSC Physics [Honours]
or the CM015 Bachelor of Science [Frontier Physics] and Master of Physics
or the 53560 Master of Physics
or the 65550 Master of Quantum Technology and Computing
and PHYS4020 Frontiers in Experimental Physics and
completion of the core units in the Physics major or equivalent
Lectures: 2 x 2 hrs per week.
S1SCIE5516Materials Characterisation for Bioengineering
Prerequisites
62550 Master of Professional Engineering (ID 356) Biomedical Engineering specialisation, Electrical and Electronic Engineering specialisation
or Mechanical Engineering specialisation
lectures: 2 hrs per week; tutorial/activity: 2 hrs per week for up to 12 weeks
S1SHPC4001Computational Methods for Physics
Prerequisites
Enrolment in in the
HON-GEOPH Geophysics
or HON-PHYSC Physics
or CM015 Bachelor of Science Frontier Physics and Master of Physics
or 53560 Master of Physics
and
CITS1401 Computational Thinking with Python
or CITX1401 Computational Thinking with Python
and
completion of the core units in the Physics major or equivalent
or
Course Enrolment in the
65550 Master of Quantum Technology and Computing and ( CITS1401 Computational Thinking with Python
or CITX1401 Computational Thinking with Python
and
MATH1012 Mathematical Theory and Methods
or MATX1012 Mathematical Theory and Methods
and PHYS2001 Quantum Physics and Electromagnetism
and PHYS3001 Quantum Mechanics )
or 73660 Master of Medical Physics
Lectures: 3 x 45 minutes per week; Practical Classes: 1 x 45 minutes per week

See also the rules for the course and the Student Rules.

Rules

Note: This course is not available in 2026.

Applicability of the Student Rules, policies and procedures

1.(1) The Student Rules apply to students in this course.

(2) The policy, policy statements and guidance documents and student procedures apply, except as otherwise indicated in the rules for this course.

Academic Conduct Essentials and Communication and Research Skills modules

2.(1) A student who enrols in this course for the first time irrespective of whether they have previously been enrolled in another course of the University, must undertake the Academic Conduct Essentials module (the ACE module) and the Communication and Research Skills module (the CARS module).

(2) A student must successfully complete the ACE module within the first teaching period of their enrolment. Failure to complete the module within this timeframe will result in the student's unit results from this teaching period being withheld. These results will continue to be withheld until students avail themselves of a subsequent opportunity to achieve a passing grade in the ACE module. In the event that students complete units in subsequent teaching periods without completing the ACE module, these results will similarly be withheld. Students will not be permitted to submit late review or appeal applications regarding results which have been withheld for this reason and which they were unable to access in the normally permitted review period.

English Language competency requirements

3. To be eligible for consideration for admission to this course an applicant must satisfy the University's English language competence requirement as set out in the University Policy on Admission: Coursework.

Admission requirements

4. To be considered for admission to this course an applicant must have—

(a) a bachelor's degree in electrical and electronic engineering, engineering science, physics, applied physics, or a related cognate discipline, or an equivalent qualification, as recognised by UWA;

and

(b) the equivalent of a UWA weighted average mark of at least 50 per cent

Admission ranking and selection

5. Where relevant, admission will be awarded to the highest ranked applicants or applicants selected based on—

(a) the weighted average mark (WAM)

Articulations and exit awards

6. This course does not form part of an articulated sequence.

Course structure

7.(1) The course consists of units to a total value of 96 points (maximum value) which include conversion units to a value of 24 points.

(2) Units must be selected in accordance with the course structure, as set out in these rules.

Satisfactory progress

8. To make satisfactory progress a student must pass units to a point value greater than half the total value of units in which they remain enrolled after the final date for withdrawal without academic penalty.

9. A student who has not achieved a result of Ungraded Pass (UP) for the Communication and Research Skills module (the CARS module) when their progress status is assessed will not have made satisfactory progress even if they have met the other requirements for satisfactory progress in Rule 8.

Progress status

10. 1) A student who makes satisfactory progress in terms of Rule 8 is assigned the status of 'Good Standing'.

(2) Unless the relevant board determines otherwise because of exceptional circumstances—

(a) a student who does not make satisfactory progress for the first time under Rule 8 is assigned a progress status of 'On Probation';

(b) a student who does not make satisfactory progress for the second time under Rule 8 is assigned a progress status of 'Suspended';

(c) a student who does not make satisfactory progress for the third time under Rule 8 is assigned a progress status of 'Excluded'.

11. A student who does not make satisfactory progress in terms of Rule 9 is assigned the progress status of 'On Probation', unless they have been assigned a progress status of 'Suspended' or 'Excluded' for failure to meet other satisfactory progress requirements in Rule 8.

Award with distinction

12. To be awarded the degree with distinction a student must achieve a course weighted average mark (WAM) of at least 80 per cent which is calculated based on—

(a) all units above Level 3 attempted as part of the course that are awarded a final percentage mark;

(b) all relevant units above Level 3 undertaken in articulating courses of this University that are awarded a final percentage mark;

and

(c) all units above Level 3 completed at this University that are credited to the master's degree course.

Deferrals

13. Applicants are not permitted to defer admission to this course and are expected to commence their course in the offered intake only. Applicants seeking admission to an alternative intake must submit a new application for that intake.